Furnace Features
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- Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
- Heated by shortwave IR tube lamps for fasting heating
- Two heating zones, 195 mm each, total 390 mm in length for HPCVD
- Sample holder is slidable in inside retractable bellows, which can achieve fast heating or cooling under vacuum or controlled atmosphere
- Vacuum flanges and the digital vacuum gauge are installed for immediate use.
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| Voltage |
- AC 208-240V, three phase, 50/60 Hz
- 24 Kw
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| Heating Element |
- 16 pcs 1.5 Kw Halogen light tube, ( Dia. =10mm, L=390mm )
- Standard working life: 2000 hrs. ( depends on heating rate )
- The Halogen light tube is consumable. Please click picture left to order spare.
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| Max. Temperature |
- 1100°C (< 30 minutes )
- 1000°C ( continuous )
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| Temperature Accuracy |
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| Max. Heating Rate |
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| Max. Cooling Rate |
- 10 °C/sec Max. Cooling Rate from 1000~200C:
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| Process Tube Size |
- High purity fused quartz tube
- Φ110(OD)×Φ106(ID)×740(L), mm
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| Sliding Rails |
- Dual sliding rails made of Cr plated steel
- Sliding rail length: 400 mm
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| Thermocouple |
- Two K type, 1/4" Dia x 24" length
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Temperature Controller
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- Two temperature controller included to control two zone independently via SCR
- PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built-in overheating & thermocouple broken protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- PC Control:
- An MTS-02 control module is included for PC control on this furnace.
- The new version of PC module is now compatible with Lab View 05/08/2014
- A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping.
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| Vacuum Flanges |
- Stainless steel quick vacuum flanges are installed on both ends of the tube for easy assembling
- 1/4"diameter feedthrough on left flange for inserting K-type thermal couple
- Digital vacuum gauge is included
- KF25 right angle valve is installed for connecting to a vacuum pump
- Needle valve for vacuum release is included
- One retractable bellows is installed on left flange, which allows sample hold sliding to cold under controlled vacuum or atmosphere
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| Vacuum Level |
- Limited by vacuum pump
- 10^-2 torr can be achieved by mechanical pump
- 10^-4 torr can be reached by molecular pump
- The pump is not included .
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| Water Cooling (optional) |
- Cooling water is required.
- Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
- We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.
- Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise, O-ring may melt.
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| Dimensions |
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| Net Weight |
~180 Kg |
| Shipping Weight |
500 lbs |
| Warranty |
Two years limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order replacements at related products below).
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| Laptop, software & WiFi Control(Optional) |
- Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
- Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters operating range.
- Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
- Note:
The software is only compatible with MTI's Yudian Temperature Controller
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| Compliance |
- CE Certified
- All electric components ( >24V) are UL / MET / CSA certified
- The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
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Application Notes
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- Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
- Quartz tubes should be replaced after every 10th use to ensure the best performance.
- Samples should never be placed on the tube directly;
- After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.
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