TMAXCN Brand 1200c Tube Furnace with Internal Travel Mechanism for Pecvd

• Application: Industry, School, Hospital, Lab
• Customized: Customized
• Certification: CE, ISO
• Structure: Tubular
• Material: Stainless Steel
• Type: Tubular Furnace
• Model NO.: TMAX-1200X-S-HPCVD
• Transport Package: Wood Packing
• Trademark: TMAX
• Origin: China

Product Description

1200C Tube Furnace with Internal Travel Mechanism for PECVD

TMAX-1200X-S-HPCVD is a compact 2" split tube furnace with internal sample traveling system inside the processing tube. This allows the position & temperature control of the sample stage or crucible via touch screen digital controller.  It is designed for multi-functional rapid thermal processing, such as hybrid physical-chemical deposition(HPCVD), rapid thermal evaporation (RTE), and as well Horizontal Bridgman Crystal Growth ( HDC) under various atmosphere for new generation crystal research.

SPECIFICATIONS:

Split Tube Furnace	208 - 240 VAC, 50/60Hz,  1.2 KW max. power consumption Working temperature:  1100°C continuous and 1200°C Max. 2" quartz tube (50mm O.D x 44mm I.D x 450mm L)  with vacuum sealed flanges. Optioanl:  you may choose dual zone tube furnace at Pic below right at extra cost to creat higher thermal gradient or longer constant temperature zone                -- two zone furnace
Temperature Control	PID automatic control via solid state relay with 30 steps programmable Built in Over Temperature and Thermocouple Failure Protection +/-1°C accuracy K-type thermal couple Heating zone  length:  200mm  ( 8") Constant temperature zone: 60 mm   (+/-1°C @ 1000 °C )
Vacuum Sealing	2" quick clamp flange with 1/4''  fittings, vacuum gauge as well as needle valve on the right side The right flange is connected to a stainless steel bellow which is stretchable up to 150 mm. Left flange with quick-clamped KF25 vacuum port and 1/4'' barb venting valve  Max. Vacuum level:  10E-2 torr by mechanical pump and 10-E5 by turbopump
Internal Traveling Mechanism                     & PLC Control Pannel	One 1/4" Dia. x 24'' long K-type thermal couple is inserted through the right flange to support a  mini-crucible boat in the chamber. A step motor can drive the crucible inside the tube from the heating center to the right end of the furnace, 100 mm max. Touch screen control panel allows travel distance setting and temperature display of crucible position Traveling speed is constant at 180mm/ min. ( variable speed control is available upon request at additional cost ) A 50x20x20mm mini-crucible boat (~20ml) is installed on a thermal couple (click pic.3 to view). AIN Sample Holder or Graphite Flat Substrate Holder for the wafer is available upon request, additional customization fee will apply
Max. Heating & Cooling Rate	The max heating and cooling rate can be achieved by moving sample into pre-heated hot zone and move the sample out from hot zone.  The typical ramp/cool rate is listed in below:
Optional Parts	You may need a right angle valve & bellows to connect a vacuum pump ( click the 1st & 2nd pics to order ) Anti-Corrosive digital Gauge up to 10E-5 torr is optional for CVD application (Pic 3) You may order multi-channel gas delivery system for DVD or CVD operation ( Pic 4)
Dimensions
Warranty	Two years limited warranty with lifetime support (Consumable parts such as tubes and o-rings are not covered by the warranty)
Laptop, software & WiFi Control(Optional)	Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Labview Based Temperature Control System  enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces. A wireless remote control provides up to 300 meters operating range. Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information. Note: The software is only compatible with MTI's Yudian Temperature Controller  ·
Compliance	CE Certified All electric components ( >24V) are UL / MET / CSA certified The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost.
Warning	Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
Application Notes	This multi-functional furnace is suitable for the applications in below: RTE:  Crucible loaded with evaporation material is placed in the center of the furnace, move sample holder to a downstream position with appropriate temperature where the deposition takes place. HPCVD: Similar setup as RTE, we also introduce reactant gas to mix with evaporation vapor and make deposition Horizontal Bridgman Crystal Growth:  Load material and seed into a crucible and place it in the center of the furnace. Move the crucible at the desired speed to grow single crystal under suitable thermal gradient. If you have any question and suggestion, please contact us before purchasing After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low For Horizontal directional crystalization  (HDC), you may use a gas feedtrough as pic below:

 

---