| Furnace Structure |
- Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
- One set of sliding rails is installed which allows furnace move from one side to the other side automatically at variable speeds using the control knob.
- Vacuum flanges and the digital vacuum gauge are installed for immediate use.
|
| Power |
9KW |
| Voltage |
AC 208-240V Single Phase, 50/60 Hz |
| Max. Temperature |
- 1000°C (<1 hour)
- 800°C (<2 hours)
- 600°C (continuous)
Note: RTP furnaces should not be heated for long durations due to thin refractories. |
| Temperature Accuracy |
+/ - 2°C |
| Max. Heating Rate |
50 ºC/s |
| Max. Cooling Rate |
Cooling Rate from 900~200C:
8.3°C/sec (900 - 600°C);
4.4°C/sec (600°C - 500°C);
2.8°C/sec (500°C - 400°C);
1.6°C/sec (400°C - 300°C);
0.9°C/sec (300°C - 200°C); |
| Process Tube Size |
High purity fused quartz tube
Ø4" OD x 1400mm L |
| Sliding Rails / Table |
- Dual sliding rails made of Cr plated steel
- Sliding rail length: 1200 mm
- Driven by DC motor
|
Sliding Control
|
Automatic sliding is controlled by the temperature controller. When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow heated area to achieve fast cooling.
- Sliding Range: 340mm
- Sliding Speed: 0-70 mm/s; adjustable
|
| Heating Elements |
8 pcs Paralleled Infrared Heating ( 1200w each)
|
| Thermocouple |
K type, 1/4" Dia x 24" length
|
| Temperature Controller |
- PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built-in overheating & thermocouple broken protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- PC Control:
- An MTS-02 control module is included for PC control on this furnace.
- The new version of PC module is now compatible with Lab View 05/08/2014
- A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping.
|
Vacuum Flanges
|
Stainless steel vacuum flanges are installed on both ends of the tube.
Right flange:
- Hinge-type flange for easy sample loading
- 1/4"diameter feedthrough for inserting K-type thermal couple
- Needle valve with barb gas fitting is built in
Left flange:
- Digital vacuum gauge is included
- KF25 right angle valve is installed for connecting to a vacuum pump
- Needle valve for vacuum release is included
|
| Vacuum Level |
Limited by vacuum pump
- 10^-2 torr can be achieved by mechanical pump
- 10^-4 torr can be reached by molecular pump
Vacuum pump is not included, please order separately at related products section |
| Flow Meter |
One flow-meter is built in with range: 16-160 ml/min |
| Dimensions |
- 460 x 330 x 520 mm ( furnace only)
- 1800 x 450 x 680 mm ( furnace + sliding)
- (click to enlarge the picture)
|
| Net Weight |
~ 80 Kg |
| Shipping Package Size |
74" x 39" x 45" |
| Shipping Weight |
300 lbs |
| Warranty |
Two years limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
| Laptop, software & WiFi Control(Optional) |
- Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
- Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters operating range.
- Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
- Note:
- The software is only compatible with MTI's Yudian Temperature Controller
-
|
| Compliance |
- CE Certified
- All electric components ( >24V) are UL / MET / CSA certified
- The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
|
| Application Notes |
- Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
- The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
- Quartz tubes should be replaced after every 10th use to ensure the best performance.
- Samples should never be placed on the tube directly;
- After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.
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