Customization: | Available |
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Production Scope: | Product Line |
Production continuity: | Continuous |
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Model | TMAX-RLG700L; TMAXRLG750L;TMAX-RLG850L |
Measurement method | Scanning measurement, fixed-point measurement, cyclic fixed-point measurement |
Testing range | 0-1000um |
Spot size | 30*1200um |
Sampling distance | 1mm |
Repetition precision | ±0.4μm |