TMAXCN Brand 1100c Compact Rtp Furnace with Quartz Tube & Digital Vacuum Gauge

• Customization: Available
• Application: Industry, School, Hospital, Lab
• Customized: Customized
• Model NO.: TMAX-1200X-RTP-4
• Certification: CE, ISO
• Structure: Tubular
• Material: Stainless Steel
• Type: Tubular Furnace
• Transport Package: Wood Packing
• Trademark: TMAX
• Origin: China

Product Description

1100C Compact Rtp Furnace with Quartz Tube & Digital Vacuum Gauge

TMAX-1200X-RTP-4 is a compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube and vacuum flanges. It is designed for annealing semiconductor wafers or solar cells with diameters up to 3". TMAX-1200X-4-RTP is heated by 8 units of 1KW halogen light with a max. the heating rate of 50ºC/second. 30 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. This furnace also can be modified into an RTE, CSS or HPCVD  furnace ( see below application note )
 
SPECIFICATIONS

Furnace Structure	Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.   High purity fibrous alumina insulation for maximum energy saving. Split cover with Interlock protection, cut the power if lid open during furnace heating process.
Power Input	208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required)
Heating Elements	8 pcs 1Kw Halogen light tube,  ( Dia. =10mm,  L=300mm, Heated Length =200mm) Standard working life: 2000 hrs.  ( depends on heating rate ) The Halogen light tube is consumable.  Please click picture left to order spare one
Heating Zone	12" length with 4" constant temperature zone within +/-5ºC uniformity
Working Temperature	1100ºC Max. for < 10 minutes 1000ºC Max. for < 20 minutes   (Note: if running longer time, furnace case will > 100oC, must use fan cooling case from outside ) 800ºC Max.   for < 120 minutes 600ºC Max.   for Continuous
Max. Heating Rate	50ºC/sec
Cooling Rate	Max. Cooling: 60ºC/min (Under vacuum: 200 mtorr), 117ºC/min (under atmospheric pressure)  Lowest Cooling:   10 ºC / minute
Thermocouple	K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath
Temperature Controller	temperature controller is included. Proportional-integral-derivative control (PID control) and auto-tune function 30 segments programmed with ramping, cooling and dwelling steps Built-in over-temperature alarm and thermocouple failure alarm +/- 1 ºC temperature control accuracy Default DB9 PC communication port MET Certified
Temperature controller (optional)	MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package  is available at the options bar. You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
Quartz Tube & Sample Holder	Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length. One 3" Diameter AlN sample holder for annealing samples up to 3" Dia is included. AlN has a very high thermal conductivity which provides the best temperature uniformity in the sample area. Optional:  3'' O.D Thick Graphite Substrate can be used as an alternative to AIN plate. (please click pic-3 below to order) Optional: Graphite Crucible:87 mm OD x 71 mm ID x 12 mm Height with lid is designed for 3" sample holder, can also be modified into an RTE, CSS or HPCVD  furnace with a graphite crucible coated with SiC. The sample holder is removable from the flange for using the RTP furnace for other purposes.
Vacuum Flange	KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and water cooling jacket. Only requires water cooling in long running times at temperatures > 600^oC. Circulating water rate: 0.5 m^3 /hr. The slide-out flange provides an easier way of loading, unloading the samples and other specific process needed. Insert-able thermal-couple for accurate measurement.
Vacuum Pump  (optional)	EQ-FYP vacuum pump is recommended for this furnace. The ultimate vacuum pressure in this system can be 10^-3 torr. Vacuum bellows and clamps are included in this package. Click here for the spec of EQ-FYP vacuum pump.
Water Cooling  (optional)	Cooling water is required. Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI. We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.    Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt.
Flow-meter	One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min
Vacuum Gauge	Digital vacuum gauge with a measurement range from 10^-4 to 1000 Torr is installed on the furnace.
Vacuum Pressure & Gas Fitting	Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter Pressure can reach 10^-4torr by molecular pump with KF25 adapter
Dimensions	Flange closed: 760mm(L) X 330mm(W) X 530mm(H) /Flange opened: 1200mm(L) X 330mm(W) X 530mm(H)
Net Weight	70 kg (150 lbs)
Warranty	One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).
Laptop, software & WiFi Control(Optional)	Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Labview Based Temperature Control System) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces. A wireless remote control provides up to 300 meters operating range. Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information. Note:  The software is only compatible with MTI's Yudian Temperature Controller
Compliance	Please select the certificate in options bar: CE Certificate & UL/CSA ready: CE approval, ready to pass UL/CSA certificate  UL certircate -  UL apprval (UL 61010), at extra cost
Optional	You may combine the RTP furnace with high vacuum station or gas livery system as vacuum furnace or CVD system. Click pictures below to see details For achieving fast cooling rate (< 10ºC/second), you may choose RTP furnace with sliding rail. Please click the picture below to see details. You may order pressure control module.
Application Notes	Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°CThe flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.  This furnace also can be modified into an RTE, CSS or HPCVD  furnace with a graphite crucible coated with SiC ( click Pic-left for detail how to set up an RTE processing by DIY ) After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.

TMAX-1200X-4-C4-SL-UL  is a special dual tube CVD system designed for coating thin film on the metal foil, especially for preparing flexible electrode on metallic foil on new generation energy research. Fast heating and cooling can be achieved by sliding the furnace. Please refer to the Operations Instructions section to see the operations of the furnace:

• A dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside tube surface for CVD reaction. 
• Vacuum sealed flanges for the dual tube, which allow reactive gasses to flow between two tubes ( 10mm space ) and inert gas flow inside the tube for cooling.
• 4 gas channels controlled by 4 separate digital MFCs
• Vacuum pump is included with KF25 adapter and pipe for plug and play
• Sliding rail is installed on the bottom of single zone furnace, which allows for fast heating or cooling by sliding furnace from one side to the other side.
• One slide stopping clamp is included for holding the position of the furnace.

Both heating zone and vacuum system are selectable: Single or dual heating zone; High-Speed Oilless Dry Vacuum Pump - VBS-M1 or Two Stage Mechanical Pump - VBS-ACP15.

SPECIFICATIONS:
 

Furnace Structure	Single heating zone High purity Al2O3 insulation chamber guarantees excellent temperature uniformity. Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation. Sliding flange assembly is made of stainless steel. Dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside tube surface for CVD reaction Heating zone length: 440mm Constant temperature heating zone length: 120 (±1°C) @400~1100°C	Dual heating zone   High purity Al2O3 insulation chamber ensures excellent temperature uniformity. Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation. Max. Temperature: 1200°C and continuous temperature: 1100°C. Two Heating Zones controlled separately: Dual direction sliding rails to ensure furnace moves smoothly. 200mm length for each heating zone, 400mm total heating length 250mm constant temperature zone if the two zones heating at same temperature 500oC max temperature difference if place a thermal block in between two zone
Power	Single heating zone Power: 208-240VAC,  50/60Hz, single phase,  2.5KW ( 20A Breaker required)	Dual heating zone Power:  208-240VAC,  50/60Hz, single phase,  4 KW ( 50A Breaker required)  10 feet power cable with no plug (ask a licensed electrician to do the plug)
Heating Temperature	Max. Temperature: 1100°C Continuous Temperature: 1000°C
Heating & Cooling Rate	Max. heating and cooling rates depend on working temperature.  Please click on tables below to see the Max. heating & cooling rate varies at different temperature range. ( You shall calibrate temperature and heating cooling rate at your working condition before use )             Heating plot            Cooling plot
Fused Quartz Tubes	High purity quartz tube: Two pairs of vacuum sealed flanges with water cooling jackets and stainless steel needle valves Outside tube EQ-QZTube-101D-1400: OD:4"x ID: 3.8" X 55" Length (OD 100 x ID 96 x 1400 mm ) Inside tube EQ-QZTube-80D-1800: OD:3.15: x ID x 2.95" x 70.8" Length (OD 80 x ID 75 x 1800 mm
Vacuum Flanges	Using dual tube for inducing CVD growth on metal foil (wrapped around interior tube surface):   1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and the space  between the outside tube and inside the tube (this space is considered as a reaction chamber). Left side flange: Barb fitting with needle valve as gas inlet, a digital vacuum gauge with measuring range 10^-4 to 1000 torr, water cooling inlet/outlet included Right side flange: Right angle valve with KF25 flange fitting, a vacuum release needle valve, water cooling inlet/outlet included   1-2. Leave both ends of inside tube open for gas cooling.     Ultimate vacuum pressure:   10^-2 torr (by mechanical pump)                                           10^-5 torr (by turbo molecular pump)
Temperature Controller	PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built-in over temperature alarm and protection allows for operation without any attendant. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communications Port. Advanced Temperature Control (Optional) MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar.  You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
Mass Flow Meters & Gas Mixing Station	4 precision mass flow controller ( MFC)  with digital display and adjusting knob are installed on the left bottom case to control gas flow rate: 4 Gas channels (contact MTI sales if need more) MFC 1: Control range from 0~100 SCCM MFC 2: Control range from 0~200 SCCM MFC 3: Control range from 0~200 SCCM MFC 4: Control range from 0~500 SCCM Flowing rate accuracy: ±1% FS Gas inlet and outlet: 1/4" Swagelok tube connector One 80mL gas mixing tank is installed in bottom case Each gas channel has a stainless steel needle valve for easy on/off   The flow rate is adjustable from the MFC panel
Vacuum Pump Station and valves	Optional 1: Pfeiffer's High Speed (226L/min) Oilless Dry Vacuum Pump, 10E-3 Torr Limit is installed inside a heavy duty mobile cart. Please click the picture below for more details. KFD25 adapter and stainless steel pipe are connected between pump and tube flange with a precision ball valve. 10E-2 Torr vacuum can be achieved inside processing tube Digital vacuum gauge (made in the USA) is installed on the left side flange.  (Optional) For higher vacuum level to 10^-5 torr, please order below mobile turbo pump.	Optional 2:   The heavy duty Double Step Rotary Vane Vacuum Pump with Exhaust Filter & KF-D25 Inlet is installed inside a heavy duty mobile cart. Please click the picture below for more details. 6.7x10^-4 mbar vacuum can be achieved inside processing tube Digital vacuum gauge (made in the USA) is installed on the left side flange. Please click the second picture below for more details For higher vacuum level to 10^-5 torr, please order below mobile turbopump at extra cost:
Water Cooling Function	Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure the best-sealed chamber at high temperature:   Water cooling flanges require >= 10L/M water flow. You may use tap water as the coolant, but we strongly suggest you to use a recirculating water chiller for environmental considerations. Please click thumb below to order the water chiller at extra cost.
Optional Parts (building up a single tube furnace)	You can build up an 80mm Dia. single tube reaction chamber by ordering extra sealing flanges and install them onto interior tube:   Left side flange: Barb fitting with needle valve as gas inlet and 1/4'' feedthrough fitting for customer to insert a measuring sensor Right side flange: KF25 fitting with mechanical gauge and vacuum release valve
Dimension	Furnace: 550 x 380 x 520mm Bottom mobile case x 2: 600 x 600 x 600mm (one for gas mixing station and the other for vacuum pump)
Shipping	Shipping Weight: ~800 lb Shipping by freight with three pallets Crating fee will be applied
Warranty	One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Laptop, software & WiFi Control (Optional)	Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces. A wireless remote control provides up to 300 meters operating range. Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information. Note:  The software is only compatible with MTI's Yudian Temperature Controller
Compliance	CE Certified All electric components ( >24V) are UL / MET / CSA certified The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
Application Notes	Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace. One slide stopping clamp is included for holding the position of the furnace.   After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.
Warning	Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gears such as heat resistant suit & gloves if you intend to do so.  DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

 

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