| Furnace |
structure |
Compact 4" RTP Tube Furnace(Double layer steel case mullite liner) |
| Heating element |
8 pcs Halogen light tube (D=10 L=300 T =200, mm) |
| Working Temp. |
1100° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting )
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| Max heating rate |
50° C/sec |
| Max cooling rate |
64° C/min (Under vacuum: 200 mtorr), 117° C/min (Under atmosphere pressure) |
| Heating zone |
12" length with 4" constant temperature zone within +/-1°C uniformity |
Program Temp. Controller
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- PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
- 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Please click here to learn why SCR is more accurate than SSC (Solid state relay).
- Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- PC Control:
- A MTS-02 control module is included for PC control on this furnace.
- The new version of PC module is now compatible with Lab View 05/08/2014
- A laptop PC can be ordered for $900 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping.
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| Quartz Tube & Sample Holder |
- Quartz Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length
- 3" diameter Sample holder is inserted to sliding flange, which is made of quartz
- One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia.
- AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
- The sample holder is removable from flange
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| Vacuum flange |
KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.
Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.
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Water Cooling Jacket
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- Cooling water is required.
- Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
- We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.
Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds. |
| Flow meter |
One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min |
| Power input |
208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required) |
HV Station
High Vacuum Station |
Structure |
- Mobile cart size: 600 (L) x 600 (W) x 700(W), mm
- Max. Loading: 600 Lbs on top
- Molecular pump control Panel : LCD digital
- Diaphragm Pump and Turbo Molecular Pump are installed inside the steel case.
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| Vacuum Degree |
6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes) |
| Control panel |
- One button operation - the diaphram pump and the turbo molecular pump will start after pressing "start" button.
- System controlled spining speed - the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber.
- Self protection - the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum.
- LCD screen - double lines parameters checking interface make the working easier to be handled.
Self testing Spinning up
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| Start-up time |
2 minutes |
| Backing Pump Volume Flow Rate at 10 mbar |
3.8 L/min for 50Hz and 4.4 L/min for 60Hz |
| Power input |
110V AC or 220V AC switchable, 50/60Hz |
| Power consumption |
Duration/Max power: 100/110Watt |
| Shipping Info |
Weight and Dimension |
RTP furnace: 110 lbs, 760 x 330 x 530mm (30" x 13" x 21" inch) L x W x H
HV station: 40 lbs, 600 x 600 x 700mm (24" x 24" x 28") L x W x H |
| Warranty |
Two years limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.) |
| Laptop, software & WiFi Control (Optional) |
- Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
- Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters operating range.
- Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
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| Compliance |
- CE Certified
- The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost. Please contact us for quote and detail information.
- Temperature controller is MET and CE Certified
- High Vacuum Station is TUV Certified
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