TMAXCN Brand 1200c Dual Zones CVD Tube Furnace with Mass Flow Control System & Vacuum System

• Customization: Available
• Application: Industry, School, Hospital, Lab
• Customized: Customized
• Model NO.: TMAX-1200double CVD
• Certification: CE, ISO
• Structure: Tubular
• Material: Stainless Steel
• Type: Tubular Furnace
• Transport Package: Wood Packing
• Trademark: TMAX
• Origin: China

Product Description

1200C Dual Zones CVD Tube Furnace with Mass Flow Control System & Vacuum System

 It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection.The furnace comes with a 2-channel digital LED display mas flow gas control station.

1. Tube furnace
Detailed technical parameters

Model	TL1200-1200-I	TL1200-1200-II	TL1200-1200-III	TL1200-1200-IV
Power	3.6KW	3.6KW	3.6KW	5.2KW
Tube size(OD)(mm)	Dia60(OD)X1000mm	Dia80(OD)X1000mm	Dia100(OD)X1000mm	Dia150(OD)X1000mm
Dimensions	1140X460X695	1140X460X695	1140X460X695	1110X530X647
Supply voltage	220V
Phase	single phase
Heating element	Resistance wire imported from Sweden  A1 (resistance wire guaranteed for 2 years)
Temperature control	UAV program temperature control instrument (standard)   1, 30-stage program temperature control intelligent PID adjustment.   2. With over-temperature protection, the electric furnace heating circuit is automatically cut off when the temperature is over-temperature or broken, (when the electric furnace temperature exceeds 1200 degrees or the thermocouple is blown, the AC relay on the main circuit will be automatically disconnected, the main circuit is broken. On, the ON light on the panel is off, the OFF light is on, and the limited protection electric furnace).

	3, with 485 communication interface (standard when purchasing software) 4, with power-off protection function, that is, when the power is turned on after the power is turned off, the program does not start from the starting temperature, but the furnace temperature rises from the time of power failure. 5, the meter has the function of temperature self-tuning
Furnace material	High-quality high-purity alumina polycrystalline fiber curing furnace formed by vacuum suction filtration.   Formed by Japanese technology.   The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated by the thermal software.
Valve and flange

60/80/100 top view
Control accuracy	+/- 1 ºC
Trigger	Phase-shifted trigger
Electric appliance	Zhejiang chint
Silicon controlled	106/16E Simenkang, Germany
The highest temperature in the first and second temperature zones	1200 ºC
Rated temperature in the first and second temperature zones	1100 ºC
Length of heating section in the first temperature zone	205mm
Length of heating section in the second temperature zone	205mm
Length of constant temperature section in the first temperature	80mm

 

zone
Length of constant temperature section in the second temperature zone	80mm
Heating rate	≤30 ºC/ Min (it can be modified as required)
Temperature field curve
Recommended rate of temperature rise	≤15   ºC/ Min
Thermocouple Type	K Type
Constant temperature length	150mm
Peripheral surface temperature	≤45ºC
Open cover protection system	When the furnace cover is opened, the relay will automatically cut off the main power supply, effectively ensuring the safety of the user

2. Gas supply system
Introduction to gas supply system:
  (1) Components of the (mixed) gas system:

a)       Float flow meter or proton flow meter
b)       Pressure gauge
c)       Cut-off valve
d)       Interface board
e)       Valve connector
f)        Cylinder connector
g)       Teflon tube (connecting pipe for gas supply or mixed system station and gas cylinder connection pipe )
h)       Mixed gas tank
i)         Stainless steel pipe (connecting pipe for gas supply or mixed control system station)
j)         Cover

•  Main technical data

No	Item	D08-2E
1	Output Power	+15V±5% 300mA -15V±5% 600mA
2	Reference Source	+5.00V±0.1% 5mA
3	Power Supply	~220V/~110±10% 50/60Hz
4	Maximum Power	25W
5	Input and Output Signal	0~+5V
6	Dimension	Standard Dimension  :(440X100X220)mm Maximum Dimension :(440X114X278)mm
7	Weight	4.2Kg
8	Control Channel Figure and Display Feature	2 Channel of MFC/MFM and 2 Display Monitor

 
3. Vacuum System
The system (can pump the vacuum in the tube furnace to 0.6Pa) consists of a suction flange (self-made) with KF25 interface, high vacuum baffle method, resistance vacuum gauge, bellows, bracket (homemade), vacuum pump Connect the tee pipe at the flange outlet, connect the resistance silicon to one end of the three-way pipe, connect the high vacuum flapper valve to the other end, connect the flapper valve and the vacuum pump with the corrugation of Dia25, and use the KF25 quick clamp for the connection port. 
    Technical Parameters:
* Distribution regulation: ZJ-52T resistance gauge
* Measuring range: 10 5 ~10 -1 Pa
* Number of measurements: 1 way
* Number of control channels: 2 roads can be extended to 4 or 8 roads
* Control range: 5 × 10 3 ~ 5 × 10 -1 Pa
* Control mode: relay contact output, load capacity AC220V/3A (or DC28V/3A) non-inductive load
* Power: 90-260V/50Hz or 220V ± 10% 50Hz
* Power consumption: 25W
* Weight: 4Kg/3Kg/0.5Kg (depending on the chassis)
* Chassis size: 240 × 88 × 280 or 265 × 119 × 280 or 96 × 96 × 120
480 × 88 × 280 or 480 × 119 × 280 (width × height × depth)
    Performance characteristics:
*LED green screen digital display.
* Wide range of star surveys
* Fast response speed
* Microcomputer correction regulates nonlinearity and reduces measurement errors.
* Optical isolation, digital filtering, enhanced anti-interference ability.
* PVC color panel, beautiful appearance.
* Point control or area relay control output, while the set point has power-down protection memory function.  
 
 Adopt FX-16 vacuum pump