TMAXCN Brand 1200c Max Dual Sliding Tube Furnace with 50 mm Tube Flanges

• Application: Lab
• Customized: Customized
• Certification: CE, ISO
• Structure: Tubular
• Material: Stainless Steel
• Type: Tubular Furnace
• Model NO.: TMAX-1200X-S-50-DFSL
• Transport Package: Wood Packing
• Trademark: TMAX
• Origin: China

Product Description

1200C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges

TMAX-1200X-S-50-DFSLis  a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min.  Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.

SPECIFICATIONS

Furnace Structure	Both furnaces are double layer steel structure with 1200°C max. working temperature Each Furnace has 200mm heating zone and 60 mm long constant temperature zone One pair of sliding rails are installed on bottom of furnace, which allows furnace to be  manually moved from side to side with max sliding distance 400 mm. Vacuum flanges is installed for immediate use.
Power of furnace	2.5 KW in total
Voltage	AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
Max. Temperature	1200°C (<1 hour)
Continuous Temperature	1100°C
Heating & Cooling Rates
Heating Zone Length	200mm( ~8")  for each furnace
Constant Temperature Zone	60 mm (+/-1°C @ 400-1200°C)
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Processing Tube Size	High purity fused quartz tube Size:  50mm O.D x 44mm I.D x1400 mm Length
Temperature Controller	Two furnaces are PID automatic control with 30 programmable segments for precise control of  heating rate, cooling rate and dwell time. Built-in over temperature alarm and protection allows for operation without an attendant. Two K-type thermal couples are included.  Optional:   The furnace may be operated by PC by installing control module. Please order an MTS-02 control module at extra cost.  If you order the PC control module together with the furnace, we will install and  test it before shipping.  We recommend you to order a computer (laptop)  from us to avoid software installation problems.
Temperature Accuracy	+/ - 1°C
Vacuum Flanges	Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy duty support.  Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost.
Sliding Rails / Table	Double sliding rail made by Cr-plated steel Sliding length: 1200 mm Two slide stopping clamps are included for holding the position of the furnaces.
Vacuum Level	Limited by pump ( pump is not included, click on pictures to order ) 10E-5 torr can be achieved via molecular pump 10E-2 torr can be achieved via a mechanical pump.
Optional for upgrate	Motorized sliding is available upon request. 1-9 chaanel gas mixing and delivery moudles is availle ( click the picture 2nd picture in below to order ) 100W - 500W  RF plasma generator for plasma enhanced processing is available upon request.  This module allows you build your own Plasma Enhanced Thermal CVD system
Dimensions	Furnace: 340 x 300 x 400 mm Total:1600 x 430 x 500 mm ( furnaces + sliding )
Net Weight	~ 80 Kg
Shipping Package Size	70" x 45" x 45" (inch)
Shipping Weight	300 lbs
Warranty	Two years limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty,  please order replacements at related products below).
Laptop, software & WiFi Control(Optional)	Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces. A wireless remote control provides up to 300 meters operating range. Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information. ·         Note:  The software is only compatible with MTI's Yudian Temperature Controller
Compliance	CE Certified All electric components ( >24V) are UL / MET / CSA certified The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
Application Notes	Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.   The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
Warning	Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gears such as heat resistant suit & gloves if you intend to do so.  DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

 

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